ISOLDE VI

 

Continuous through feed grinder equipped with 4 vertical spindles and 2 tilting spindles dedicated to grinding and chamfering of silicium blocs before wafering

 

Performances:
Resolution 0.001 mm
High performance spindles, direct drive
Modular rigid steel frame combined with prestressed concrete
Measurement and automatic servo
Automatic, semi-automatic or manual loading

Number of spindles
4 (surfaces)
4 (chamfers)
Number of robots
2
Operations and
stock removal
rough grinding up to 1 mm/side
finish grinding up to 0.08 mm/side
chamfer 45° x 1.5 mm
Grinding tools
diamond wheels ø 400 mm
Cutting speed
up to 100 m/sec
Production
up to 25 blocs/h
Quality, guaranteed
flatness within 0.05 mm
parallelisme within 0.05 mm
squarness within 0.25°
thickness between 155.5 and 156.5 ± 0.03 mm
surface finish ≤ Ra 0.08  ≤ Rz 0.8

 

Spécifications techniques

Number of spindles

Spindle

Z-axis

Rotation speed

Power

Width max.

Height max.

Abrasive tools

Grinding wheel

Infeed

Electrical control

Total weight

Stock removal

Resolution

4 surfaces, 2 chamfers

ø200×500 mm +AFS ø80×200 mm

120 mm

0-6000 rpm

4x 29/2x 5 kW

170 mm

160 mm

CBN/diamond/Al2O3

ø400/ø250 mm

0-4000 mm/min

Siemens S7/1500/TIA

10 t

1 mm

0.001 mm
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